SPATIAL LIGHT MODULATOR MIRROR METAL HAVING ENHANCED REFLECTIVITY

摘要

In accordance with the teachings of the invention, a spatial light modulator mirror metal having enhanced reflectivity is provided. In a particular embodiment of the invention, a light processing system includes a light source operable to provide a light beam along a light path and a spatial light modulator (100) positioned in the light path, the spatial light modulator comprising an array of pixel elements, each pixel element comprising a deformable micro-mirror (104a,b) operable to reflect the light beam in at least one direction. At least a portion of each deformable micro-mirror comprises an Al-Cu alloy. A controller (102) electrically connected to the spatial light modulator is operable to provide electrical signals to the spatial light modulator to cause the spatial light modulator to selectively deform the pixel elements, thereby selectively reflecting incident light beams along a projection light path.