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发明名称
Vorrichtung zum thermischen Behandeln von Substraten
摘要
申请公布号
DE10024709(B4)
申请公布日期
2008.03.13
申请号
DE20001024709
申请日期
2000.05.18
申请人
STEAG RTP SYSTEMS GMBH
发明人
KREISER, UWE
分类号
G21K5/00;B01J19/08;H01K1/02;H01K1/14;H01K1/50;H01K7/00;H01L21/00;H01L21/324
主分类号
G21K5/00
代理机构
代理人
主权项
地址
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