| 摘要 |
PROBLEM TO BE SOLVED: To provide an annealing apparatus and an annealing method wherein a great optical power is generated by utilizing LEDs as a heat source. SOLUTION: The annealing apparatus includes a process chamber 1 wherein an object W is disposed, heat sources 7a, 7b having a plurality of LED elements 33 with which light is irradiated onto the object W, a feeding device 10 for feeding electricity to the plurality of LED elements 33, cooling devices 6a, 6b and 20 for cooling the LED elements, and light transmitting members 5a, 5b disposed between the process chamber 1 and the heat sources 7a, 7b. In the apparatus 100, the object W is annealed by being irradiated with light emitted from the LED elements 33. The LED elements 33 are comprised of GaAs-based materials. A high optical output power is generated from the LED elements 33 driven with high current while the LED elements 33 are being cooled by the cooling devices 6a, 6b and 20. COPYRIGHT: (C)2008,JPO&INPIT
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