| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure beam spot positions of light beams to be scanned. SOLUTION: When a photodetector 71 of an optical characteristic measuring instrument 70 is successively positioned by driving an X stage and a Y stage, at light receiving positions on which light beams LB1, LB2, LB3, LB4 emitted from an optical scanner 100 are each made incident, a positional coordinate in the stage coordinate system of the photodetector 71 is corrected on the basis of error quantitiesδ(X),δ(Y) and an angular errorΔθ. Thus, accurate measurement is made possible at each beam spot position of the light beams LB1-LB4 in the stage coordinate system. COPYRIGHT: (C)2008,JPO&INPIT
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