| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for producing a thin film, which stably connects a gas-supplying pipe for supplying a gas with a discharge electrode and inhibits the distribution of film thickness or film quality from spreading. <P>SOLUTION: The apparatus for producing the thin film comprises: a film-forming chamber 2; a counter electrode 5 installed in the film-forming chamber 2 and grounded; a discharge electrode 3 which is installed in the film-forming chamber 2, faces its surface side toward the counter electrode 5 and spouts a gas; a power feeder 8 for supplying a high-frequency power to the discharge electrode 3 extending from the outside into the film-forming chamber 2; a discharge-regulating part 6 which is installed in the film-forming chamber 2, is connected to the backside of the discharge electrode 3 and regulates the discharge of the discharge electrode 3; and a gas-supplying pipe 10 which is made from a conductive material, extends from the outside into the film-forming chamber 2, is connected to the backside of the discharge electrode 3 and supplies the gas toward the discharge electrode 3. The discharge-regulating part 6 and the gas-supplying pipe 10 are approximately integrated at the backside of the discharge electrode 3, and the respective parts of the approximately integrated body are connected to the discharge electrode 3. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
