摘要 |
PROBLEM TO BE SOLVED: To detect a sense amplifier having an unbalanced characteristic. SOLUTION: In a testing method of a semiconductor storage device detecting the sense amplifier having the unbalanced characteristic, an intermediate potential different from levels H and L in normal operation is restored in a first memory cell of a first bit line connected to the sense amplifier to be tested, a charge amount when capacitance of a capacitor is effectively low is stored in the first memory cell, then data of the first memory cell is read out and malfunction of the sense amplifier is checked from an error of the read data. After the first memory cell is selected and sense amplifier is activated for forming the intermediate potential in the bit line, different multiple word lines are selected while pairs of bit lines are separated from the sense amplifier and the bit line potential is set to be the intermediate potential by the reversed data. COPYRIGHT: (C)2008,JPO&INPIT
|