Lattice-mismatched epitaxial films formed proximate non-crystalline sidewalls. Embodiments of the invention include formation of facets that direct dislocations in the films to the sidewalls.
申请公布号
WO2008030574(A1)
申请公布日期
2008.03.13
申请号
WO2007US19568
申请日期
2007.09.07
申请人
AMBERWAVE SYSTEMS CORPORATION;BAI, JIE;PARK, JI-SOO;LOCHTEFELD, ANTHONY, J.