APPARATUS OF MANUFACTUREING LIQUID DISPLAY PANEL

摘要

An apparatus for fabricating a liquid crystal panel is provided to reduce a defective proportion and improve display quality of a liquid crystal panel by enhancing the performance of an electrostatic adsorption chuck that adsorbs an array substrate and a color filter substrate. A chamber(100) receives an array substrate(10) with liquid crystal coated thereon and a color filter substrate(20) attached to the array substrate in a facing manner. The first support(410) is provided in the chamber and supports the array substrates. The second support(420) faces the first support and supports the color filter substrate. A vacuum pump(200) is connected with the chamber and removes a foreign material from the interior of the chamber while lowering pressure within the chamber. The first supply unit(300) provides the first gas into the chamber to press and attach the array substrate and the color filter substrate. A cooling member(500) cools the interior of the chamber.