| 摘要 |
A convergent electron beam is incident on an evaluation region of a crystalline material to obtain a HOLZ pattern formed by the convergent electron beam transmitted to the crystalline material (Steps S 11 to S 13 ), a split width of the HOLZ line of the obtained HOLZ pattern is computed (Step S 14 ), and a stress in the evaluation region of the crystalline material is evaluated based on the split width of the HOLZ line (Step S 15 ). Thus, the stress measuring method and system can measure with good precision a local lattice strain amount and stress value of the crystalline material, and a stress value of a stress source applying a stress to the crystalline material.
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