发明名称 |
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PIPE CONNECTION JIG USED THE SAME |
摘要 |
A semiconductor manufacturing apparatus and a pipe connection jig installed therein are provided to increase or maximize productivity by using a distributive tube connection jig for identifying a fastening degree of distributive tube connection units. A reaction chamber(110) includes a space sealed from an outside in order to perform a semiconductor manufacturing process. A source(120) is formed to supply one or more kinds of gas or fluid in the semiconductor manufacturing process. A distributive tube(130) is formed between the source and the reaction chamber in order to move the gas or the fluid. A distributive tube connection unit(140) is formed to form a cut part of the distributive tube. A distributive tube connection jig(150) is coupled with an outer circumference of the distributive tube connection unit in order to guide a fastening degree of the distributive tube connection unit.
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申请公布号 |
KR20080021888(A) |
申请公布日期 |
2008.03.10 |
申请号 |
KR20060085033 |
申请日期 |
2006.09.05 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
YUN, JOON HEE;CHOI, KWAN MOOK |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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