发明名称 DEVICE AND METHOD FOR PATTERNING STRUCTURES ON A SUBSTRATE
摘要 A device for patterning structures on a substrate includes an imaging device having a scanning tip, a light emitting device, and a space around the scanning tip. The space comprises a vapor of a material which is suitable for Chemical Vapor Deposition onto the substrate when decomposed. The light emitting device is adapted to emit a light beam, which has an intensity not capable to decompose the vapor, onto the scanning tip in such a way that an electromagnetic field induced by the light beam near the scanning tip is high enough to decompose the vapor.
申请公布号 KR100810018(B1) 申请公布日期 2008.03.07
申请号 KR20067009303 申请日期 2006.05.12
申请人 发明人
分类号 B82B3/00;C23C16/04;H01J37/317 主分类号 B82B3/00
代理机构 代理人
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