| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface modification device for a solid material in which the change of the concentration in a modifier compound comprised in a fuel gas is reduced. SOLUTION: Regarding the surface modification device for a solid material and the surface modification method using the same, the device is provided with: a storage chamber for storing a modifier compound comprising silane atoms or the like; a vaporization chamber for evaporating the modifier compound in a gas-liquid equilibrium state and producing a modifier compound in a gaseous state; a transfer section for transferring the modifier compound in a gaseous state to a jet section as a part of a fuel gas; and the jet section for blowing the flame of the fuel gas, and, provided that the temperature of the vaporization chamber is Tl(°C) and the temperature of the storage chamber is defined as T2(°C), the T1 and T2 satisfy the temperature relational inequality of T2-15°C≤T1≤T2+15°C. COPYRIGHT: (C)2008,JPO&INPIT
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