| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput for continuing the processes by changing attitude of a substrate while it is transferred. SOLUTION: An attitude changing apparatus 30 transfers the substrate S carried in the sloping attitude with a conveyor 15 to a robot R2 by changing the substrate into the horizontal attitude. The apparatus 30 includes a substrate storing unit 40 having a first storage 40A and a second storage 40B arranged in upper and lower sides; a mechanism for changing the attitudes of the storages 40A, 40B; and a mechanism for moving upward and downward a unit 40 for a first position where the first storage 40A corresponds to the conveyor 15, and a second position where the second storage 40B corresponds to the conveyor 15. Moreover, the attitude changing mechanism of the storages 40A and 40B changes the first storage 40A to the sloping attitude and the second storage 40B to the horizontal attitude when the unit 40 is in the first position, also changes the storages 40A and 40B to the inverted attitude when the unit 40 is in the second position, and moreover carries out this switching operation during position changing operation of the unit 40. COPYRIGHT: (C)2008,JPO&INPIT
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