发明名称 VAPOR DEPOSITION HOLDER
摘要 PROBLEM TO BE SOLVED: To provide a vapor deposition holder capable of depositing an optical thin film with excellent accuracy by preventing vignetting. SOLUTION: The vapor deposition holder has masks 20, 21 for masking a part of an inner wall surface of a resin-molded product 10 having an opening part. The masks 20, 21 are formed of a metallic material to be attracted by magnets 31, 32, and an auxiliary holder 50 is fitted to the upper portion of the resin-molded article 10. The magnets 31, 32 are arranged on inner wall side surfaces 33, 34 of the auxiliary holder 50 at the positions opposite to the masks 20, 21, and the mask 20 and the mask 21 are tightly attached to inner wall side surfaces 11, 12 of the resin-molded product 10. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008050624(A) 申请公布日期 2008.03.06
申请号 JP20060225066 申请日期 2006.08.22
申请人 NIKON CORP 发明人 SHIOTANI HIDEKAZU
分类号 C23C14/50 主分类号 C23C14/50
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