COMPENSATING MASK, MULTI-OPTICAL SYSTEM USING THE SAME MASK, AND METHOD OF COMPENSATING 3-D MASK EFFECT USING THE SAME MASK

摘要

A compensating mask, a multi-optical system using the same, a method for compensating a 3-dimensional mask effect using the same are provided to dramatically shorten an optical proximity correction time by using a composite optical mask kernel. A general mask kernel for a fine pattern formation is generated(S150). A compensating mask kernel is generated(S150a). The general mask kernel and the compensating mask kernel are combined to create a composite kernel of a multi-optical system(S160). The general mask kernel and the compensating mask kernel are generated by adjusting a standard optical parameter and a pupil surface function of a projection lens located at a lower of an optical system. The standard optical parameter includes an illumination condition, the number of apertures, and a wavelength. The pupil surface function includes the magnitude of light and a phase thereof.