Turbo-molecular vacuum pump, has motor coils connected with brake resistor by change-over contact of brake relay e.g. mechanical relay, and with inverter module by another change-over contact of brake relay

摘要

The vacuum pump (10) has safety bearings (22, 23) attached to magnetic bearings (20, 21), and an electric drive motor (18) with motor coils for driving of a pump rotor (16). A brake relay (42) e.g. mechanical relay, and a brake resistor (50) are connected with the motor coils by a contact (45) of the brake relay. The motor coils are connected with the brake resistor by a change-over contact (46) of the brake relay and with an inverter module (32) by another change-over contact (47) of the brake relay.