发明名称 METHOD FOR FORMING ITO ELECTRODES FOR A DISPLAY
摘要 <p>A method for creating an ITO(Indium Tin Oxide) electrode for a display is provided to reduce manufacture time and manufacture cost by using a low temperature sintering process instead of a photolithography process. An ITO solution mixed with ITO of 20 to 50 wt.% is prepared(100). The ITO solution is loaded into an ink jet printer and injected onto a substrate(110). The substrate is heated under nitrogen atmosphere to eliminate moisture(120) at temperature of 120 ‹C. The substrate is thermally treated to form an ITO electrode. The ITO solution is an ITO aqueous solution made of the ITO of 35 wt.% and the remaining of an aqueous solution. The aqueous solution is TMAH(tetramethyl ammonium hydroxide) and water having pH 11.</p>
申请公布号 KR100809983(B1) 申请公布日期 2008.03.06
申请号 KR20060134692 申请日期 2006.12.27
申请人 KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY 发明人 LEE, SUNG KOO;LEE, KYEONG K.;CHOI, HYUN CHUL
分类号 H01L51/50;G02F1/1343 主分类号 H01L51/50
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