| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus which enables an apparatus user to immediately notice the abnormality of the apparatus by observing graphs. <P>SOLUTION: During the execution of recipes, data recorded while executing a specific recipe a plurality of times are extracted from timing data measured and recorded in each processing included in the recipes and a superimposed graph is prepared to indicate the extracted data with the same start time and same scale. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
