摘要 |
<p><P>PROBLEM TO BE SOLVED: To achieve a sufficient polarization close to a saturated polarization while preventing the breakdown of an element, particularly the element breakdown due to a driving under a low pressure is prevented in the laminated piezoelectric element. <P>SOLUTION: When the laminated piezoelectric element is polarized as alternately laminating piezoelectric ceramic layers and internal electrode layers; a first DC polarization applying a DC voltage, a pulse polarization applying a pulse voltage, and a second DC polarization applying the DC voltage are conducted in the order. The first DC polarization and the second DC polarization are conducted without applying a pressure to the laminated piezoelectric element, and the pulse polarization is conducted by applying a specified pressure to the laminated piezoelectric element. The pulse polarization is conducted under conditions with an element temperature kept within a range of 120 to 200°C. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |