| 摘要 |
PROBLEM TO BE SOLVED: To detect fine damage flaws and damage flaws specific to ceramic in spherical surface of a chargeable ceramic sphere, which are difficult to be detected with a conventional optical means. SOLUTION: A visual inspection device inspecting surface damage flaws of a ceramic sphere such as silicon nitride, zirconia, alumina, silicon carbide comprises rotating devices 2-5 to rotate the ceramic sphere in oil in the meridian manner after dipping the ceramic sphere 1 to be inspected in oil, an imaging means 7 to image all surface of the ceramic sphere 1 rotating in the meridian manner with the rotating devices, an image processing means 9 to process picked-up images by the imaging means 7. The surface damage flaws of the ceramic sphere is detected with processing the picked-up images of the spherical surface. COPYRIGHT: (C)2008,JPO&INPIT
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