| 摘要 |
<p>A substrate inspecting apparatus (1) is provided with an inspecting unit (50) for inspecting a substrate (P); a substrate supply unit (24) by which the inspecting unit (50) can be manually supplied with the substrate (P); and a liquid crystal monitor (4) for displaying prescribed information including the results of the inspection of the substrate (P). The inspecting apparatus is also provided with a camera (52) for recognizing identifying information given to the substrate (P), and a control unit (60). The control unit confirms inspection history of the substrate (P), based on the identifying information acquired through the camera (52), controls the liquid crystal monitor (4) to display that the substrate (P) has been inspected when it is confirmed that the substrate has been inspected, and prohibits execution of inspection of the substrate (P) by the inspecting unit (50).</p> |
