| 摘要 |
PROBLEM TO BE SOLVED: To provide a purification treatment furnace of a graphite material capable of efficiently carrying out deaerating after purification treatment under high vacuum without exposing a heating chamber to the atmosphere and readily carrying out repair of heater or the like. SOLUTION: A cooling chamber 10 is connected to a heating chamber 30 by an intermediate door hood 40 equipped with an intermediate door 44 at cooling chamber side and an intermediate door 45 at heating chamber side and an N2 gas feeding pipe and a vacuum discharge pipe are each connected to the cooling chamber, the intermediate door hood and the heating chamber and a gas feeding pipe for purification treatment of graphite and the discharge pipe for discharge gas are each connected to the heating chamber and a heat insulating material 33 is internally applied to the inner surface of furnace shell 31 of the heating chamber and the clearance and an electric heater 37 is arranged onto the inner wall side of the heat insulating material and the N2 gas feeding pipe is connected to the clearance. |
