发明名称 |
Determining fleet matching problem and root cause issue for measurement system |
摘要 |
Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause of a matching problem, and for determining a fleet measurement precision metric. |
申请公布号 |
US7340374(B2) |
申请公布日期 |
2008.03.04 |
申请号 |
US20050065740 |
申请日期 |
2005.02.25 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ARCHIE CHARLES N.;BANKE, JR. GEORGE W.;SOLECKY ERIC P. |
分类号 |
G06F17/18 |
主分类号 |
G06F17/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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