| 摘要 |
The invention relates to a large-area sensor arrangement, notably a flat dynamic X-ray detector (FDXD). The light-sensitive and/or X-ray-sensitive sensors (pixels) of the sensor arrangement are arranged in a planar distribution on a substrate ( 1 ), thus forming a sensitive layer ( 20 ). On the top surface of the layer ( 20 ) there is provided a contact point ( 23 ) for each sensor, which contact point is connected to an integrated circuit ( 6 ) via one or more connection layers ( 30, 40 ). A multi-layer, very compact construction is thus obtained in which the electronic evaluation circuitry ( 6 ) is arranged in a planar fashion and parallel to the sensors ( 20 ). Preferably, a respective evaluation circuit in the circuit ( 6 ) is associated with each sensor, resulting in very short paths and also in a reduction of noise.
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