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发明名称
Silicon-on-insulator substrate, its fabrication method and MEMS floating structure formed therein
摘要
申请公布号
EP1650158(B1)
申请公布日期
2008.02.27
申请号
EP20050022281
申请日期
2005.10.12
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHUNG, SEOK-WHAN;CHOI, HYUNG
分类号
B81B3/00
主分类号
B81B3/00
代理机构
代理人
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