发明名称 TRAY CLEANER AND METHOD FOR CLEANING TRAY USING THE SAME
摘要 An apparatus and a method for cleaning a tray are provided to clean a transport tray quickly by simultaneously cleaning upper and lower surfaces of the transport tray. A tray upper-surface cleaning unit(410) includes first air spray holes spraying air blow onto an upper surface of a transport tray(T) and a first vacuum suction unit applying vacuum onto the upper surface of the transport tray. A tray lower-surface cleaning unit(420) includes a cleaning unit having second air spray holes spraying air blow onto a lower surface of the transport tray and a second vacuum suction unit, and a pickup unit moved to a cleaner buffer and fixing the transport tray at cleaning.
申请公布号 KR100806378(B1) 申请公布日期 2008.02.27
申请号 KR20060115039 申请日期 2006.11.21
申请人 SECRON CO., LTD. 发明人 KIM, SUN O
分类号 H01L21/00;H01L21/02;H01L23/28 主分类号 H01L21/00
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