发明名称 Ultraviolet blocking layer
摘要 Semiconductor structures and methods of fabricating semiconductor structures are disclosed. The method comprises the steps of: providing an initial semiconductor structure; forming a non-silicon layer overlying the initial semiconductor structure, the non-silicon layer having an extinction coefficient greater than zero at wavelengths below about 300 nanometers; and performing a plasma-based process to form a layer overlying the non-silicon layer, the non-silicon layer preventing the ultraviolet radiation generated during the plasma-based process from damaging the initial semiconductor structure.
申请公布号 US7335610(B2) 申请公布日期 2008.02.26
申请号 US20050116719 申请日期 2005.04.28
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 LUOH TUUNG;YANG LING WUU;CHEN KUANG CHAO
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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