发明名称 |
Ultraviolet blocking layer |
摘要 |
Semiconductor structures and methods of fabricating semiconductor structures are disclosed. The method comprises the steps of: providing an initial semiconductor structure; forming a non-silicon layer overlying the initial semiconductor structure, the non-silicon layer having an extinction coefficient greater than zero at wavelengths below about 300 nanometers; and performing a plasma-based process to form a layer overlying the non-silicon layer, the non-silicon layer preventing the ultraviolet radiation generated during the plasma-based process from damaging the initial semiconductor structure.
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申请公布号 |
US7335610(B2) |
申请公布日期 |
2008.02.26 |
申请号 |
US20050116719 |
申请日期 |
2005.04.28 |
申请人 |
MACRONIX INTERNATIONAL CO., LTD. |
发明人 |
LUOH TUUNG;YANG LING WUU;CHEN KUANG CHAO |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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