| 发明名称 |
End-effectors for handling microelectronic wafers |
| 摘要 |
End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of abutments and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments.
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| 申请公布号 |
US7334826(B2) |
申请公布日期 |
2008.02.26 |
| 申请号 |
US20020194939 |
申请日期 |
2002.07.11 |
| 申请人 |
SEMITOOL, INC. |
发明人 |
WOODRUFF DANIEL J.;HARRIS RANDY A.;ERICKSON JAMES J.;CARR DOUGLAS W. |
| 分类号 |
B65G49/07;B25J19/02;H01L21/00;H01L21/687 |
主分类号 |
B65G49/07 |
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