发明名称 Method for increasing the yield of layout and the recording medium having the same
摘要 A method for increasing the yield of layout and a recording medium having the same are provided to minimize the whole fail rates of the layout by determining the margin having a minimum fail rate on every pattern of the layout. A pattern, which satisfies all rules in a layout, is selected(S10). A margin as a minimum grid margin is added to a value on at least one of plural rules related to the selection pattern based on ground and recommend rules on respective rules(S20 S30). Whole fail rate on at least one rule varied according to the addition of the margin is calculated and the margin to be added is determined based on the calculation result(S40 S70).
申请公布号 KR20080016765(A) 申请公布日期 2008.02.22
申请号 KR20060078456 申请日期 2006.08.19
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO, DAE HYUNG
分类号 H01L21/02;H01L21/027 主分类号 H01L21/02
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