| 摘要 |
<P>PROBLEM TO BE SOLVED: To properly set inspecting conditions used for a visual inspection apparatus and a visual inspection method such as optical conditions and defect detecting conditions depending on a sample to be actually inspected. <P>SOLUTION: The visual inspection apparatus 1 is constituted so as to detect defects existing on a surface of the sample 2 by inspecting an image captured from the surface of the sample 2 on the predetermined optical conditions, and provided with: a defect detecting section 24 for detecting the defects in the image on the predetermined detecting conditions; and an inspecting condition determining section 50 for determining the conditions for detecting a known standard defect 9 previously disposed on an inspected surface of the inspected sample by using the defect detecting section 24 from one of the predetermined optical conditions and the predetermined detecting conditions. <P>COPYRIGHT: (C)2008,JPO&INPIT |
