| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a solution having a concentration with a slight deviation from the target concentration in a method for producing a solution, which has a process for concentrating the solution to a target concentration, to obtain a polymer solution exhibiting performance as shown by a design in an objective use and a resist composition making a resist film exhibit performance as shown by a design. SOLUTION: In the method for producing a solution, having a process for concentrating a solution to a target concentration, the concentration is carried out until the refractive index of the solution reaches the refractive index of a solution in the target concentration measured in advance±0.1. COPYRIGHT: (C)2008,JPO&INPIT |
