| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric pump having highly reliable liquid-tight construction around a piezoelectric vibrator, comprising the piezoelectric vibrator having a piezoelectric body laminated on at least one of the surface and the reverse of a shim consisting of a conductive metal thin plate, and a housing for keeping the peripheral edge of the piezoelectric vibrator liquid-tight to form a pump chamber, wherein an alternating current is applied between the piezoelectric vibrator and the shim for vibrating the piezoelectric vibrator to produce pumping operation. SOLUTION: In the piezoelectric pump, a cylindrical bent part is formed at the peripheral edge of the shim of the piezoelectric vibrator and a liquid-tight seal member is laid between the cylindrical bent part and the housing. COPYRIGHT: (C)2008,JPO&INPIT
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