| 摘要 |
PROBLEM TO BE SOLVED: To reduce a load on a linear motor at the time of yawing control. SOLUTION: In this stage device 10, yawing rigidity of the gantry part 60 is adjusted in a manner that a torque with 10%-20% of a rating torque generated by a rating thrust of open-type cored linear motors 40a, 40b is larger than a torque required for correcting a yawing rotation error of the gantry part 60 to zero. Thereby, at the time of yawing control, burdens of Y-direction linear motors 40a, 40b can be reduced. COPYRIGHT: (C)2008,JPO&INPIT
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