| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a program for producing an original data that can produce data of an original for forming a highly-accurate pattern with a smaller amount of calculations and in a shorter time. <P>SOLUTION: The method includes: a step of obtaining a two-dimensional transmission cross coefficient based on a function representing a light intensity distribution formed by an illumination apparatus on a pupil plane of the projection optical system and a pupil function of the projection optical system; an aerial image calculation step (S62) of obtaining an approximated aerial image by using one of a plurality of components of an aerial image on an image plane of the projection optical system or by adding two or more components in the plurality of components, based on the two-dimensional transmission cross coefficient and information about a target pattern; and an original data producing step (S63) of producing data of an original pattern based on the approximated aerial image. <P>COPYRIGHT: (C)2008,JPO&INPIT |
