| 摘要 |
A substrate carrying device, comprising a cassette side conveyor (3) capable of carrying out substrates (W) from a cassette (CS), a process side transfer hand (5) capable of feeding the substrates (W) to a process device for processing the substrates (W), and a substrate delivery means (7) capable of delivering the substrates (W) between the cassette side conveyor (3) and the process side transfer hand (5). |
