| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetoresistive element for improved in stability in magnetic characteristics by suppressing thermal damage to a free ferromagnetic layer, to provide a manufacturing method of the magnetoresistive element, and to provide a manufacturing apparatus of the magnetoresistive element. SOLUTION: A diffusion barrier layer formation process (step S6) is performed after a free layer formation process (step S5), and an oxide layer (diffusion barrier layer) is formed only on the surface of the free ferromagnetic layer by oxidizing an oxygen radical. Then, a protective layer formation process (step S7) is performed after the diffusion barrier layer formation process (step S6), and a protective layer is laminated on the diffusion barrier layer. COPYRIGHT: (C)2008,JPO&INPIT
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