| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern pitch measuring apparatus capable of numerically knowing a change in pattern pitches. SOLUTION: The pattern pitch measuring apparatus includes a transfer amount detecting means for detecting an amount of transfer of a web, a mark detecting means for detecting marks provided on the web at predetermined pattern pitches and outputting a mark signal, a mark interval calculating means for inputting the amount of transfer and the mark signal for calculating a distance between marks, a storage means for storing a predetermined number of most recent mark intervals, an average value calculating means for calculating an average mark interval which is an average value of the predetermined number of mark intervals, and an output means for outputting the average mark interval. COPYRIGHT: (C)2008,JPO&INPIT
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