Partially Oxidized Macroporous Silicon with Discontinuous Silicon Walls

摘要

A device and method for producing a "biochip base module" for detecting biochemical reactions for the study of enzymatic reactions, nucleic acid hybridizations, protein-protein interactions and other binding reactions in the field of genome, proteome, or active-agent research. A flat macroporous support material having a multiplicity of 500 nm to 100 mum diameter pores distributed over at least one surface region and extending from one surface through to the opposite surface of the support material. The device has two or more regions having pores with SiO₂ pore walls. These regions are each surrounded by a frame or box of walls with a silicon core arranged parallel to the longitudinal axes of the pores and is open towards the surfaces. The silicon core merges into silicon dioxide over the cross section towards the outer side of the walls forming the frame, and each individual frame is spatially isolated from the frames surrounding it.