| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator device that has excellent displacement characteristics while preventing breakage of a piezoelectric element, and to provide its manufacturing method and a liquid injection head. <P>SOLUTION: The actuator device is provided with the piezoelectric element 300 composed of a lower electrode 60, a piezoelectric-body layer 70, and an upper electrode 80. All these elements are displaceably provided on a substrate 10. The piezoelectric-body layer 70 is provided up to the outside of each end of the lower electrode 60. Each side face 61 with thickness gradually reduced step by step toward the outside of the piezoelectric element 300 is provided at each end of the lower electrode 60. Each side face 61 is formed into a step-like shape by defining it with a first face 62 in the same direction as the surface direction of the substrate, and a second face 63 vertical to the first face 62. <P>COPYRIGHT: (C)2008,JPO&INPIT |
