SPUTTERING APPARATUS WITH MULTIANGULAR BARREL, SURFACE-MODIFIED CARBON MATERIAL AND PRODUCTION METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a sputtering apparatus with a multiangular barrel, which can make the outer surface of a carbon carrier carry many catalytic fine particles thereon; a carbon-supported catalyst; and a production method therefor.

SOLUTION: The sputtering apparatus with the multiangular barrel comprises: a vacuum vessel 1 of which the inner part has a polygonal shape in a cross section cut along an approximately parallel direction to gravity; a dispersing member which is accommodated in the vacuum vessel and disperses secondary particles formed by the agglomeration of primary particles of a carbon carrier 3 into the primary particles or secondary particles smaller than the original secondary particles; a rotating mechanism for rotating the vacuum vessel around a rotation axis which is approximately vertical to the cross section; and a sputtering target 2 arranged in the vacuum vessel. The production method includes carrying out a sputtering operation to make the carbon carrier 3 carry fine particles or a thin film on the surface, while dispersing the secondary particles of the carbon carrier 3 by the dispersing member while stirring or rotating the carbon carrier 3 in the vacuum vessel 1 by rotating or swinging the vacuum vessel with the use of the rotating mechanism.

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