| 摘要 |
PROBLEM TO BE SOLVED: To accurately and quickly measure the depth of a minute hole with a high aspect ratio. SOLUTION: An objective optical system is arranged on a side where a minute hole on a plate-like member on which a minute hole with a high aspect ratio is formed is not opened so as to measure a transmitted light by applying a transmitting illumination light from the opposite side. The position of a bottom part of the minute hole is detected by detecting a contact of a focal plane of the objective optical system with the bottom part of the minute hole from a shadow of a transmitted light image, so that a depth (height) of the minute hole is calculated. COPYRIGHT: (C)2008,JPO&INPIT
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