发明名称 |
POWER SUPPLY UNIT FOR GENERATING PLASMA AND PLASMA APPARATUS INCLUDING THE SAME |
摘要 |
A power supply unit includes: a power source generating a radio frequency power; an impedance matching box connected to the power source and matching an internal impedance of the power source and a load impedance; a first feed line connected to the impedance matching box; a radio frequency distributing means connected to the first feed line; and a plasma electrode connected to the radio frequency distributing means, the radio frequency distributing means supplying the radio frequency power to a plurality of points of the plasma electrode.
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申请公布号 |
US2008044321(A1) |
申请公布日期 |
2008.02.21 |
申请号 |
US20070923425 |
申请日期 |
2007.10.24 |
申请人 |
JUSUNG ENGINEERING CO., LTD. |
发明人 |
LEE JEONG-BEOM |
分类号 |
B01J19/12;C23F1/00;H01J17/49;H01J37/32;H05H1/46 |
主分类号 |
B01J19/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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