发明名称 CONTAINER TRANSPORTING APPARATUS AND CONTAINER TRANSPORTING SYSTEM
摘要 Provided are a container transporting apparatus and a container transporting system which can suitably transport containers corresponding to a process speed, arrangement configuration and the like of a processing apparatus. The container transporting system is provided for transporting the container which stores substrates inside, and is provided with a plurality of container transporting apparatuses. The container transporting apparatus is provided with a transporting robot having a lifting means for lifting the container being held and a linearly shifting means; and a placing table for placing at least one container.
申请公布号 KR20080016614(A) 申请公布日期 2008.02.21
申请号 KR20077028573 申请日期 2006.06.30
申请人 RORZE CORPORATION 发明人 SAKIYA FUMIO
分类号 B65G49/07 主分类号 B65G49/07
代理机构 代理人
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