发明名称 Apparatus for wavefront detection
摘要 An apparatus for wavefront detection includes a wavefront source for the production of a wavefront, an optical system transforming the wavefront, a diffraction grating through which the transformed wavefront passes, and a spatially resolving detector following the diffraction grating. The wavefront source has a two-dimensional structure.
申请公布号 US7333216(B2) 申请公布日期 2008.02.19
申请号 US20010792607 申请日期 2001.02.23
申请人 CARL ZEISS SMT AG 发明人 WEGMANN ULRICH;HAIDNER HELMUT;SCHRIEVER MARTIN
分类号 G01B9/00;G01M11/02;G01J9/02;G03F7/20;H01L21/027 主分类号 G01B9/00
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