| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a tool for substrate inspection capable of easily mounting a probe for inspection. SOLUTION: In the method of manufacturing the substrate inspection tool having an inspection-side support and an electrode-side support for the probe for inspection, an intermediate plate having a guide hole for guiding a linear section of the probe for inspection is arranged at an intermediate position between the inspection-side support and an electrode-side support, an inspection end guide hole for guiding the inspection end of the probe for inspection in the inspection-side support toward a desired inspection point, the guide hole in the intermediate plate existing at the intermediate position, and an electrode end guide hole for guiding an electrode end of the probe for inspection in the electrode-side support toward a desired electrode are aligned in a straight line, the probe for inspection is inserted into each aligned guide hole, the intermediate plate is moved to be brought into contact with the inspection-side support, the electrode-side support is shifted in the direction orthogonal to the straight line, and the probe for inspection is kept in a tilted state. COPYRIGHT: (C)2008,JPO&INPIT
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