发明名称 |
IMAGE SENSORS INCLUDING MULTIPLE SLOPE/IMPURITY LAYER ISOLATION REGIONS, AND METHODS OF FABRICATING SAME |
摘要 |
Image sensors include a pixel region and a logic region. Pixel isolation regions in the pixel region include pixel isolation region walls that are less sloped than logic isolation region walls in the logic region. An impurity layer also may be provided adjacent at least some of the pixel isolation region walls, wherein at least some of the logic isolation region walls are free of the impurity layer. The impurity layer and/or the less sloped logic isolation region walls may also be provided for NMOS devices in the logic region but not for PMOS devices in the logic region. Doped sacrificial layers may be used to fabricate the impurity layer.
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申请公布号 |
US2008035963(A1) |
申请公布日期 |
2008.02.14 |
申请号 |
US20070668016 |
申请日期 |
2007.01.29 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KWON DOOWON;SHIN SEUNG-HUN |
分类号 |
H01L31/113 |
主分类号 |
H01L31/113 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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