| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a color filter inspection method by which inspection efficiency is improved by reflecting defect information detected in an inspecting machine in a before step in defect judgement of an inspection machine in a post step. <P>SOLUTION: The inspection result information on a color filter substrate from a plurality of inspecting means provided for each manufacturing step of the color filter substrate is stored in databases and servers connected to the plurality of the inspection means while being made to correspond to a substrate ID given to each color filter substrate. In the inspection of the color filter substrate by the inspecting means provided in the manufacturing step of the next or later, the inspection result information in the before manufacturing step is retrieved and obtained from the databases and the servers by using the substrate ID and is compared with the inspection result in the manufacturing step of the next or later and the defect detected in the inspection in the before manufacture step and judged within the specification is excluded from the judgement of the inspection result. <P>COPYRIGHT: (C)2008,JPO&INPIT |
