发明名称 MEMS SWITCH AND MANUFACTURING METHOD THEREOF
摘要 A micro-electro mechanical system (MEMS) switch includes a fixed electrode formed on a substrate, and a movable electric resistor formed on the substrate, the movable electric resistor serving as an electric resistor that divides an electric potential where the MEMS switch is set to a conduction state.
申请公布号 US2008035458(A1) 申请公布日期 2008.02.14
申请号 US20070832038 申请日期 2007.08.01
申请人 SEIKO EPSON CORPORATION 发明人 WATANABE TORU;SATO AKIRA;INABA SHOGO;MORI TAKESHI
分类号 H01H57/00;H01H11/00 主分类号 H01H57/00
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