APPARATUS FOR DEPOSITING THIN FILMS OVER LARGE-AREA SUBSTRATES
摘要
An apparatus for increasing uniformity of thin films deposited on a substrate includes multiple deposition sources to accommodate and discharge evaporation material. A member supports the deposition sources in a selected arrangement. A heater can be used to apply heat to the deposition sources. In another embodiment, the apparatus can include a container to accommodate evaporation material. The container may include aperture at or near its center. A cover caps an opening of the container and includes multiple gas outlets. The apparatus further includes a heater disposed along an inner surface of the aperture and along an outer surface of the container.
申请公布号
WO2008018705(A1)
申请公布日期
2008.02.14
申请号
WO2007KR03647
申请日期
2007.07.30
申请人
SOONCHUNHYANG UNIVERSITY INDUSTRY ACADEMY COOPERATION FOUNDATION;KIM, KUG WEON;UM, TAI JOON;JOO, YOUNG CHEOL;LEE, SANG WOOK
发明人
KIM, KUG WEON;UM, TAI JOON;JOO, YOUNG CHEOL;LEE, SANG WOOK