| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a hard carbon coating film exhibiting a reduced friction coefficient and capable of being manufactured by a simple process. <P>SOLUTION: The hard carbon coating film contains 1.4-39 atom% cobalt or nickel in the coating film, and a cobalt aggregate or a nickel aggregate among them is controlled so that a region occupied by the aggregate 2 having an equivalent circle diameter of more than 5 nm may be ≤15%, and the film has a hard particle and a particulate projection on the surface and a surface roughness Ry is 0.1-0.6 μm. The hard carbon coating film contains 1.4-39 atom% cobalt or nickel in a sliding layer, and the cobalt aggregate or the nickel aggregate among them is controlled so that the region occupied by the aggregate 2 having the equivalent circle diameter of more than 5 nm may be ≤15%, and the film has the hard particle and the particulate projection on the surface of the sliding layer and the surface roughness Ry is 0.1-0.6 μm. When an area ratio of the aggregate having the equivalent circle diameter of more than 5 nm is X% and a total content of the cobalt and the nickel is Y atom%, X<4Y is filled. <P>COPYRIGHT: (C)2008,JPO&INPIT |
